About: http://webisa.webdatacommons.org/398562583

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A source electrode 40 and a drain electrode 41 of metallic material such as aluminum, are deposited on the source region 38 and the drain region 39, respectively.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com