About: http://webisa.webdatacommons.org/398568520

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor fabricating apparatus according to claim 1, wherein said gas including oxygen is a gas selected from the group consisting of air, O2, N2 O and NO.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com