PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • As the gate insulating film 506, alternatively an insulating film such as a silicon nitride film or a silicon oxide nitride film expressed by SiOX NY can be used.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.fr