| http://www.w3.org/ns/prov#value | - A method for profiling an object surface in accordance with claim 1 wherein said range with said equivalent coherence length comprises a depth range given by the expression |p+z-z0 |???L/2 wherein L is said equivalent coherence length, p is the local surface height on said object surface, z is the scan position, and zo is a constant, whereby p varies with the position on said object surface and co
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