| http://www.w3.org/ns/prov#value | - DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0111] Embodiment modes of the present invention will be described below. [0112] Embodiment Mode 1 [0113] The following is a brief explanation on a typical procedure of manufacturing a TFT. The explanation is given with reference to FIGS. 1A to 1E. [0114] In FIG. 1A, reference symbol 10 denotes a substrate which has an insulating surface, 11, a fir
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