| http://www.w3.org/ns/prov#value | - 20090193387METHODOLOGY AND SYSTEM FOR DETERMINING NUMERICAL ERRORS IN PIXEL-BASED IMAGING SIMULATION IN DESIGNING LITHOGRAPHIC MASKS - A method is provided for designing a mask that includes the use of a pixel-based simulation of a lithographic process model, in which test structures are designed for determining numerical and discretization errors associated with the pixel grid as opposed to other
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