| http://www.w3.org/ns/prov#value | - manufacturing process for industrial products and medical products, when performing rinsing, etching, post-processing, or the like, processing is performed using a solution including chlorofluorocarbon (CFC) or a halogen such as chlorine, an acidic solution such as hydrochloric acid, an alkaline solution, or gases including a halogen or CFC. More specifically, in the field of rinsing semiconductor
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