| http://www.w3.org/ns/prov#value | - A method of inspecting objects formed on substrates selected from the group consisting of photomasks, reticles, phase shift masks and semiconductor wafers including a plurality of supposedly identical patterned objects disposed in an ordered array on a surface thereof, comprising the steps of:using a laser means to provide a pixel illuminating beam of light; using an optical means to define a firs
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