| http://www.w3.org/ns/prov#value | - A method in accordance with claim 10 wherein:each of said sets of alignment marks on said reticle have an array of blocks which are in focus at different focal lengths, including: measuring at each of said sets of alignment marks which of said blocks is in focus at each of said alignment marks, and said alignment marks including alphanumeric and other patterns which when in a best degree of focus
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