| http://www.w3.org/ns/prov#value | - A method for making a resonator, comprising: a) forming a plurality of resonators on a common substrate; the resonators including: a resonator portion adapted for resonating in a fluid; and an electrical connection including at least one electrode formed of a metal selected from gold, platinum, silver, chromium, aluminum, nickel, titanium or mixtures thereof between the resonator portion and a sou
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