| http://www.w3.org/ns/prov#value | - A method according to claim 1 which deposits a product film composed of the following chemical species: silicon, gold, tungsten, aluminum, magnesium, iron, carbon, chromium, cobalt, platinum, titanium and germanium; solid phases of oxides, nitrides, hydrides, fluorides, and other compounds containing an oxidizing agent; or combination thereof, including mixtures and alloys and compounds thereof in
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