| http://www.w3.org/ns/prov#value | - Emulation-based virtual manufacturing techniques for integrated MEMS12/01/2008 Maurice J.A. Delafosse, Dalsa Corp.Gerold Schr??pfer, CoventorIntegration of MEMS devices and CMOS electronics on one die can bring powerful capabilities, including reduced system power consumption and improved volume-to-area ratio to automotive, biomedical, RF, photonics, information technology, and other applications.
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