About: http://webisa.webdatacommons.org/399105869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Implantation species 22 in one particular embodiment is a dopant, such as phosphorous, boron, boron difluoide (BF2), arsenic, indium or other material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com