| http://www.w3.org/ns/prov#value | - A method for forming a film according to claim 1, wherein said organic silane having no Si-F bond is selected from the group consisting of:alkoxysilanes of the formula SiHn (OR)4-n, wherein n=1 to 3, R is an alkyl group, an aryl group, or a derivative thereof; alkylsilanes of the formula SiHn R4-n, wherein n=1 to 3, R is an alkyl group, an aryl group, or a derivative thereof; chain siloxanes of th
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