| http://www.w3.org/ns/prov#value | - more reliable self-aligned contacts (SAC)US5897372 *Nov 1, 1995Apr 27, 1999Micron Technology, Inc.Formation of a self-aligned integrated circuit structure using silicon-rich nitride as a protective layerUS5902132 *Apr 29, 1997May 11, 1999Oki Electric Industry Co., Ltd.Method of manufacturing a semiconductor device including a process of forming a contact holeUS5914518 *Dec 3, 1996Jun 22, 1999Stmic
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