| http://www.w3.org/ns/prov#value | - A micro space as narrow as dozens of ??m to few mm is formed between the lower end of the divider 19-7 and the upper face of the sample S. [0320] With such configuration as described above, even if the gas is discharged from the stage in association with the movement of the stage resulting in an increase of the pressure within the chamber C, and eventually is to possibly flow into the space of tip
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