About: http://webisa.webdatacommons.org/399370681

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If a RIE etch using N2 or H2 is employed, layer 34 may comprise SiLK??? (an aromatic hydrocarbon thermosetting polymer available from The Dow Chemical Company), polyimide or other polymer materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com