| http://www.w3.org/ns/prov#value | - According to this method, metals such as gold, silver, copper, aluminum, paladium, platinum and the like, metallic compounds such as SiO2, Ta2 N, Ta2 O5, ZrB2 and the like, and organic compounds, particularly polyxylylene resin and its derivatives can be deposited so as to form a film.
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