About: http://webisa.webdatacommons.org/399412644

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After a polysilicon layer 260 with a thickness of about 500???1000 ??? is conformably deposited, a planarization process, such as CMP, is applied to remove the insulating layer 254 of the cell area.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com