| http://www.w3.org/ns/prov#value | - FIG. 2B is a cross-sectional view taken along the line A-A??? in FIG. 2A. [0041]FIG. 3A is a simplified illustration showing the positional relationship of the movable element 6, the movable electrodes 10 (10 a and 10 b), and the coplanar line 3 when viewed from the upper member 4.
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