About: http://webisa.webdatacommons.org/399732774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First of all, a metal film, such as a film of Cr or Al, is formed on an insulating substrate 1 by sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr