About: http://webisa.webdatacommons.org/399751683

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 illustrates the flow of the manufacture of a microdevice (e.g., a semiconductor chip such as an IC or LSI chip, a liquid crystal panel, a CCD, a thin-film magnetic head, a micromachine, etc.).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com