About: http://webisa.webdatacommons.org/399814608

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Lithography is a mechanism by which a pattern on a mask is projected onto a substrate such as a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com