About: http://webisa.webdatacommons.org/400154117

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart illustrating a method of controlling the partial pressure of a sputtering gas at the time of sputtering by using the apparatus shown in FIG. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com