About: http://webisa.webdatacommons.org/400505387

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, other than thermal oxidation, the chemical vapor deposition method (CVD method) is employed, in which mono-silane is thermally decomposed to deposit on the surface of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es