About: http://webisa.webdatacommons.org/400538310

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Polyimide is an example of a material that does provide such toleration during the microfabrication process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca