About: http://webisa.webdatacommons.org/400661918

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conventionally, the X-ray transmitting membranes in the mask for X-ray lithography are made from a material such as boron nitride BN, silicon nitride Si3 N4, silicon carbide SiC and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com