About: http://webisa.webdatacommons.org/401017404

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This work is a fundamental study of the effects of helium (He) implantation into polycrystalline silicon (poly-Si).
http://www.w3.org/ns/prov#wasQuotedFrom	salford.ac.uk