About: http://webisa.webdatacommons.org/401017947

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The layer to be strained can advantageously have a thickness of 1 to 100 nanometers, especially 5 to 40 nanometers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com