About: http://webisa.webdatacommons.org/401203582

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	There is no particular restriction as to the method of forming the film and, for example, a knownfilm forming method such as a sputtering method, an evaporation method, or an MBE method may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com