About: http://webisa.webdatacommons.org/401302751

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier metal layer 162 may be formed from a material such as Ta, TaN, Ti or TiN, W or other suitable material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com