About: http://webisa.webdatacommons.org/401309538

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	DETAILED DESCRIPTION OF THE INVENTION [0023] The present invention is a planarizing machine and method for uniformly planarizing a wafer and accurately stopping CMP processing at a desired endpoint.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com