About: http://webisa.webdatacommons.org/401429384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The aim of these isotropic etch steps is to create substantially equal amounts of metal removal from the embedded lines, independent of feature location, size, density or other geometric parameters.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com