About: http://webisa.webdatacommons.org/401503275

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates also to a drying method of drying a workpiece, such as a semiconductor wafer, a liquid crystal panel or the like, by a drying process and a substrate processing method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es