About: http://webisa.webdatacommons.org/401579678

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etching of the layer to form the tips could be effected by any suitable wet or dry etching processes such as plasma etching, reactive ion etching, ion beam milling, or reactive ion beam milling.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr