PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • This condition will be especially true and become progressively worse as the lot size (e.g., the number of substrates per carrier) is reduced in the factories in order to reduce the Fabs cycle time.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com