About: http://webisa.webdatacommons.org/401813354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention particularly relates to a method and apparatus for depositing a III-V compound semiconductor crystal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com