About: http://webisa.webdatacommons.org/401911877

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When a defect selection area is created in the defect distribution map, the ???map process??? calculates the stage coordinates corresponding to the area and the number of the die including the area.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com