About: http://webisa.webdatacommons.org/401918827

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma etching apparatus 2 includes a processing container 4 having its sidewall and bottom made of a conductive material, such as aluminum, and shaped to be a cylinder with a bottom as a whole.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com