About: http://webisa.webdatacommons.org/401937979

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The alignment marks 506 may be formed by a semiconductor process such as photolithography and etching, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com