About: http://webisa.webdatacommons.org/401988507

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography is a technique used to form precise patterns on the substrate surface by transferring patterns from a photolithographic reticle to a substrate surface by light passing therethrough.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com