| http://www.w3.org/ns/prov#value | - The thin film stacks often include materials such as silicon dioxide (SiO2), silicon nitride (Si3N4), dielectrics, metals, metal silicides, metal nitrides or carbides, polycrystalline silicon (Si), amorphous Si, single-crystal Si, silicon germanium (SiGe) alloys or germanium (Ge).
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