About: http://webisa.webdatacommons.org/402016739

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The result is an environment in which a self-aligned contact to the source-drain region can be deposited.02-12-2015
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org