About: http://webisa.webdatacommons.org/402042589

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This substrate is adhered to a second substrate with interposition of an insulating layer such as an oxide film, and the first substrate is made thin by grinding and polishing from the rear surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com