About: http://webisa.webdatacommons.org/402300581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another exemplary embodiment, solid metal may be used as the source of metal atoms and a gaseous ceramic precursor including one or more elements such as carbon, silicon and combinations thereof may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com