About: http://webisa.webdatacommons.org/40249067

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that while a silicon oxide layer was used in this embodiment, metallic materials such as TiN, TiON, TaN, TaO, TaON, WN, W, and Ti can be used as well.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com