About: http://webisa.webdatacommons.org/402495442

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the oxidation layer 508 may be formed in-situ by supplying at least an oxygen-containing gas, such as O2, N2O, NO, CO and CO2, among others, into the etch chamber to react with the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com