About: http://webisa.webdatacommons.org/402605656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In CVD, the semiconductor wafer or other substrate is exposed to a precursor gas at a reduced pressure inside a vacuum chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com