About: http://webisa.webdatacommons.org/402864044

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the source region and the drain region and an insulating layer including the sensing surface, the insulating layer disposed on the channel region.12-31-2009
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org