About: http://webisa.webdatacommons.org/403034387

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 8a and 8 b are a cross section and plan view of a light pipe that may be used to transmit and receive light through the window that has been reflected off a wafer;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com